X
Optical pens for chromatic confocal "point" sensors

- The CL-MG Line consist of modular optical pens, comprising a chromatic lens (CL) and a magnigier lens (MG)

- Performance specifications supply for optical pens calibrated on STIL certified bench for a particular controller

CL - MG Line Specifications for CCS PRIMA Controller

Model

CL0

CL1

CL2

CL3

CL4

CL5

CL6

Measuring range (1)

µm

100

130

400

1200

3000

10000

20000

Working distance (2)

mm

2.69

3.35

10.8

12.0

16.2

25.9

21.5

Max. sample slope (3)

deg

± 42°

± 42.5°

± 28°

± 25°

± 21°

± 14°

± 8.5°

Reference plate (4)

-

No

No

Yes

Yes

Yes

Yes

No

Axial model (5)

Radial model (5)

Standart

Optional

Magnifier model

MG

210

MG

140

MG

210

MG

140

MG

210

MG

140

MG

70

MG

140

MG

70

MG

35

MG

20

MG

35

MG

20

MG

35

MG

20

NUMERICAL APERTURE

Beginning of M.R

Mid-range

End of M.R

-

-

-

0.76

0.75

0.75

0.76

0.75

0.75

0.72

0.71

0.71

0.72

0.71

0.71

0.47

0.46

0.46

0.47

0.46

0.46

0.47

0.46

0.46

0.43

0.41

0.41

0.43

0.41

0.41

0.35

0.33

0.32

0.35

0.33

0.32

0.25

0.21

0.20

0.25

0.21

0.20

0.19

0.14

0.12

0.19

0.14

0.12

LATERAL (XY) PROPERTIES

Spot size (12)

Beginning of M.R

Center of M.R

End of M.R

Lateral resolution (6)

µm

µm

µm

µm

1.6

1.8

1.9

1.1

2.0

2.2

2.4

1.0

2.4

2.7

3.0

1.1

3.2

3.5

3.8

1.3

3.5

4.0

4.4

1.7

4.6

5.2

5.7

1.8

8.1

8.8

9.3

3.7

6.0

6.8

7.4

2.6

10.8

11.9

12.6

4.5

10.7

12.3

13.4

4.6

17.6

19.9

21.3

7.0

19.6

24.3

27.2

11

32.8

40.0

44.2

14

18.6

26.8

32.7

11

30.5

43.0

51.4

18

PHOTOMETRIC EFFICIENCY (7)

Collected energy (relative)

-

0.5

1.7

3.3

10

2.8

7.9

41

10

57

25

91

33

100

9.8

43

MECHANICAL INTERFACE

Length (8)

Diameter

Weight (8)

mm

mm

g

263.6

27

227

229

27

192

253.12

27

268

217.1

27

195

243.3

27

248

208.9

27

190

176.1

27

189

205.9

27

215

176.1

27

214

145.5

27

155

131.7

27

140

145.5

27

175

131.7

27

160

167.6

0.14

195

151.8

27

180

Performances

DISTANCE MEASUREMENT

Static Noise (9)

With no averaging

With averaging 10

Accuracy (10)

Measuring rough metal surface (11)

nm

nm

nm

-

5.0

1.7

16

R

6.0

2.0

14

R

7.0

2.3

25

R

8.0

2.8

20

R

17

2.7

55

R

20

6.7

45

R

25

8.3

40

R

50

17

150

R

60

20

130

NR

110

37

300

NR

135

45

250

NR

370

123

750

NR

425

142

550

NR

700

233

1600

NR

800

277

1200

NR

THICKNESS MEASUREMENT

Min. measurable thick (14)

Max. measurable thick (14)

µm

µm

≤ 5

≤ 100

≤ 5

≤ 100

7.5

175

9

175

14

510

14

510

22

510

38

2000

40

2000

110

5700

120

5700

350

15600

550

15600

590

84000

725

84000

To see notes - Click here

CL - MG Line Specifications for CCS OPTIMA+ Controller

Model

CL0 (15)

CL1

CL2

CL3

CL4

CL5

CL6

Measuring range (1)

µm

100

150

400

1300

4000

12000

24000

Working distance (2)

mm

2.69

3.35

10.8

12.0

16.2

25.9

21.5

Max. sample slope (3)

deg

± 42°

± 42.5°

± 28°

± 25°

± 21°

± 14°

± 8.5°

Reference plate (4)

-

No

No

Yes

Yes

Yes

Yes

No

Axial model (5)

Radial model (5)

Standart

Optional

Magnifier model

MG

210

MG

140

MG

210

MG

140

MG

210

MG

140

MG

70

MG

140

MG

70

MG

35

MG

20

MG

35

MG

20

MG

35

MG

20

NUMERICAL APERTURE

Beginning of M.R

Mid-range

End of M.R

-

-

-

0.76

0.75

0.75

0.76

0.75

0.75

0.72

0.71

0.71

0.72

0.71

0.71

0.47

0.46

0.46

0.47

0.46

0.46

0.47

0.46

0.46

0.43

0.41

0.41

0.43

0.41

0.41

0.35

0.33

0.32

0.35

0.33

0.32

0.25

0.21

0.20

0.25

0.21

0.20

0.19

0.14

0.12

0.19

0.14

0.12

LATERAL (XY) PROPERTIES

Spot size (12)

Beginning of M.R

Center of M.R

End of M.R

Lateral resolution (6)

µm

µm

µm

µm

1.6

1.8

1.9

1.1

2.0

2.2

2.4

1.0

2.4

2.7

3.0

1.1

3.2

3.5

3.8

1.3

3.5

4.0

4.4

1.7

4.6

5.2

5.7

1.8

8.1

8.8

9.3

3.7

6.0

6.8

7.4

2.6

10.8

11.9

12.6

4.5

10.7

12.3

13.4

4.6

17.6

19.9

21.3

7.0

19.6

24.3

27.2

11

32.8

40.0

44.2

14

18.6

26.8

32.7

11

30.5

43.0

51.4

18

PHOTOMETRIC EFFICIENCY (7)

Collected energy (relative)

-

0.5

1.7

3.3

10

2.8

7.9

41

10

57

25

91

33

100

9.8

43

MECHANICAL INTERFACE

Length (8)

Diameter

Weight (8)

mm

mm

g

263.6

27

227

229

27

192

253.12

27

268

217.1

27

195

243.3

27

248

208.9

27

190

176.1

27

189

205.9

27

215

176.1

27

214

145.5

27

155

131.7

27

140

145.5

27

175

131.7

27

160

167.6

0.14

195

151.8

27

180

Performances

DISTANCE MEASUREMENT

Static Noise (9)

With no averaging

With averaging 10

Accuracy (10)

Measuring rough metal surface (11)

nm

nm

nm

-

5.0

1.8

16

R

6.5

2.2

14

R

7.5

2.5

25

R

8.5

2.8

20

R

17

5.7

55

R

20

6.7

45

R

28

9.3

40

R

50

17

150

R

60

20

130

NR

120

40

300

NR

145

48

250

NR

400

133

750

NR

475

158

550

NR

750

250

1600

NR

850

283

1200

NR

THICKNESS MEASUREMENT

Min. measurable thick (14)

Max. measurable thick (14)

µm

µm

≤ 5

≤ 100

≤ 5

≤ 100

7.5

175

9

175

14

510

14

510

22

510

38

2000

40

2000

110

5700

120

5700

350

16500

550

15600

590

84000

725

84000

To see notes - Click here

CL - MG Line Specifications for STIL DUO Controller

Model

CL0

CL1

CL2

CL3

CL4

CL5

CL6

Measuring range (1)

µm

100

130

400

1200

3000

10000

20000

Working distance (2)

mm

2.69

3.35

10.8

12.0

16.2

25.9

21.5

Max. sample slope (3)

deg

± 42°

± 42.5°

± 28°

± 25°

± 21°

± 14°

± 8.5°

Reference plate (4)

-

No

No

Yes

Yes

Yes

Yes

No

Axial model (5)

Radial model (5)

Standart

Optional

Magnifier model

MG

210

MG

140

MG

210

MG

140

MG

210

MG

140

MG

70

MG

140

MG

70

MG

35

MG

20

MG

35

MG

20

MG

35

MG

20

NUMERICAL APERTURE

Beginning of M.R

Mid-range

End of M.R

-

-

-

0.76

0.75

0.75

0.76

0.75

0.75

0.72

0.71

0.71

0.72

0.71

0.71

0.47

0.46

0.46

0.47

0.46

0.46

0.47

0.46

0.46

0.43

0.41

0.41

0.43

0.41

0.41

0.35

0.33

0.32

0.35

0.33

0.32

0.25

0.21

0.20

0.25

0.21

0.20

0.19

0.14

0.12

0.19

0.14

0.12

LATERAL (XY) PROPERTIES

Spot size (12)

Beginning of M.R

Center of M.R

End of M.R

Lateral resolution (6)

µm

µm

µm

µm

1.6

1.8

1.9

1.1

2.0

2.2

2.4

1.0

2.4

2.7

3.0

1.1

3.2

3.5

3.8

1.3

3.5

4.0

4.4

1.7

4.6

5.2

5.7

1.8

8.1

8.8

9.3

3.7

6.0

6.8

7.4

2.6

10.8

11.9

12.6

4.5

10.7

12.3

13.4

4.6

17.6

19.9

21.3

7.0

19.6

24.3

27.2

11

32.8

40.0

44.2

14

18.6

26.8

32.7

11

30.5

43.0

51.4

18

PHOTOMETRIC EFFICIENCY (7)

Collected energy (relative)

-

0.5

1.7

3.3

10

2.8

7.9

41

10

57

25

91

33

100

9.8

43

MECHANICAL INTERFACE

Length (8)

Diameter

Weight (8)

mm

mm

g

263.6

27

227

229

27

192

253.12

27

268

217.1

27

195

243.3

27

248

208.9

27

190

176.1

27

189

205.9

27

215

176.1

27

214

145.5

27

155

131.7

27

140

145.5

27

175

131.7

27

160

167.6

0.14

195

151.8

27

180

Performances

DISTANCE MEASUREMENT

Static Noise (9)

With no averaging

With averaging 10

Accuracy (10)

Measuring rough metal surface (11)

nm

nm

nm

-

6.0

2.0

28

R

7.5

2.5

35

R

9.0

3.0

30

R

12

4.0

38

R

20

6.7

70

R

25

8.3

75

R

35

12

80

R

60

20

200

R

70

23

200

NR

110

37

400

NR

135

45

350

NR

370

123

800

NR

425

142

850

NR

700

233

2000

NR

800

277

1700

NR

THICKNESS MEASUREMENT

Min. measurable thick (14)

Max. measurable thick (14)

µm

µm

≤ 5

≤ 100

≤ 5

≤ 100

7.5

175

9

175

14

510

14

510

22

510

38

2000

40

2000

110

5700

120

5700

350

15600

550

15600

590

84000

725

84000

To see notes - Click here