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Optical pens for chromatic confocal "point" sensors

- The OPILB Line consist of modular optical pens, comprising a chromatic lens (CL) and a magnifier lens (MG)

- Performance specifications supply for optical pens OPILB calibrated on STIL certified particular controller

OPILB LINE Specifications for STIL DUO

Model

OPILB-RP

OPILB-LWD-D

OPILB-LWD-T

OPILB

Measuring mode

-

Distance

Distance

Thickness

Thickness

Measuring range

µm

135

135

-

-

Working distance

mm

9.7

4.6

9.2

42

Max. sample slope

deg

± 17°

± 17°

± 17°

± 5.4°

Reference plate (1)

-

Yes

No

No

No

Magnifier model

MG

210

MG

140

MG

210

MG

140

MG

70

MG

35

MG

20

MG

-

LATERAL (X,Y) PROPERTIES

Spot size (diameter)(3)

Lateral resolution (2)

µm

µm

3.8

1.9

5.7

2.8

3.8

1.9

5.7

2.8

11.4

5.7

22.9

11.4

40.2

20

32

20

MECHANICAL INTERFACE

Lenght (4)

Diameter (4)

Weight

mm

mm

g

200

27

200

164

27

127

200

27

200

164

27

127

131

27

126

100

27

67

84

27

52

145.5

27

155

Performances

DISTANCE MEASUREMENT

Static Noise (5)

Accuracy (6)

Measuring rough metal surface (7)

nm

nm

-

0.5

10

NR

2

10

NR

-

-

THICKNESS MEASUREMENT

Min. measurable thick (8)

Max. measurable thick (8)

Static Noise (5)

Accuracy (6)

µm

µm

nm

nm

-

-

-

-

-

-

-

-

-

-

-

-

-

-

-

-

14

510

0.4

90

0.3

10

0.4

90

0.3

10

0.4

90

0.3

10

(1) The reference plate is placed directly on the sample. The reference plate of the OPILB-RP acts as an absolute reference. It compensates for the mechanical imperfections of the scanning system.

(2) The lateral resolution is defined as half the spot diameter.

(3) Geometrical spot size computed at the center of the measuring range, without diffraction (indicative value).

(4) Length and weight excluding the fiber optics cable.

(5) RMS noise level measured on a static sample. Measurement is performed at optimal rate on a sample located at the optimal position.

(6) The accuracy is the max error observed in the entire measuring range when comparing the distance measured by the sensor with sample position determined by a 1 nm accurate encoder.

(7) R=Recommended for measuring metallic sample (these samples can be measured with full performances). NR=Not recommended for measuring metallic samples (these samples may be measured, but with reduced performances).

(8) These values are for a sample with a refrective index = 1.5 (when measuring the thickness of an air-gap they should be multiplied by 1.5).